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Diamond sheets for CMP diamond dishes for integrated circuit manufacturing

Bench Diamond Technology is mainly engaged in the research and development, production and sales of HPHP diamonds, CVD diamonds, diamond tools and diamond testing instruments.


Key words: CVD diamond | HPHT diamond | diamond identification instrument



CMP diamond plates are important consumables for CMP technology and refer to materials used to maintain the rough state and abrasive performance of the polishing pad surface. CMP diamond plates have the advantages of high hardness, strong corrosion resistance, and extended polishing pad life, and are widely used in wafer manufacturing processes. In recent years, with the gradual development of wafer manufacturing in the direction of planarization, CMP diamond dish application prospects continue to improve.
The technical core of CMP diamond dish: the diamond particles on the surface of the diamond dish cannot be piled with sand, and the surface must be flat enough; The diamond distribution density on the surface should be sufficient to ensure a certain grinding ability; The diamond particles on the surface of the dresser cannot fall off during the grinding of the polishing pad, so as not to scratch the wafer surface.

Diamond is a product of diamond finishing. Diamond is a hard and simple gem in the world. It is a natural crystal composed of carbon and has a cubic structure. Its composition is basically the same as that of our common coal, pencil lead and sugar. Carbon element crystallizes to form graphite (black) under high temperature and pressure, while it crystallizes into precious diamonds (colorless) in high temperature, huge high pressure and reducing environment (usually an anoxic environment). Diamond yield is very small, usually colorless crystals, with a high degree of refractive properties, can reflect the colorful luster. Diamonds can be used not only as jewelry, but also as advanced cutting and grinding materials in industry. The chemical properties of diamonds are very stable, and they are not easily soluble in acid and alkali at room temperature, and acid and alkali will not affect them. Diamonds are oleophilic and hydrophobic, so in the maintenance of diamond jewelry, it is emphasized to avoid placing diamonds in a heavy oil environment that affects the fire of diamond jewelry.

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