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MengziDiamond sheets for CMP diamond dishes for integrated circuit manufacturing
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MengziCVD industry
Product Description
CMP diamond plates are important consumables for CMP technology and refer to materials used to maintain the rough state and abrasive performance of the polishing pad surface. CMP diamond plates have the advantages of high hardness, strong corrosion resistance, and extended polishing pad life, and are widely used in wafer manufacturing processes. In recent years, with the gradual development of wafer manufacturing in the direction of planarization, CMP diamond dish application prospects continue to improve.
The technical core of CMP diamond dish: the diamond particles on the surface of the diamond dish cannot be piled with sand, and the surface must be flat enough; The diamond distribution density on the surface should be sufficient to ensure a certain grinding ability; The diamond particles on the surface of the dresser cannot fall off during the grinding of the polishing pad, so as not to scratch the wafer surface.
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